Please use this identifier to cite or link to this item:
https://doi.org/10.1109/16.223700
DC Field | Value | |
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dc.title | Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope | |
dc.contributor.author | Chan, Daniel S.H. | |
dc.contributor.author | Pey, Kin Leong | |
dc.contributor.author | Phang, Jacob C.H. | |
dc.date.accessioned | 2014-06-17T06:54:28Z | |
dc.date.available | 2014-06-17T06:54:28Z | |
dc.date.issued | 1993-08 | |
dc.identifier.citation | Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H. (1993-08). Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope. IEEE Transactions on Electron Devices 40 (8) : 1417-1425. ScholarBank@NUS Repository. https://doi.org/10.1109/16.223700 | |
dc.identifier.issn | 00189383 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/62752 | |
dc.description.abstract | Five semiconductor-related parameters have been extracted simultaneously from experimental data of cathodoluminescence output collected as a function of electron-beam energy. The extraction technique is based on a recently proposed three-dimensional computer model of cathodoluminescence. It also uses a curve fitting technique based on the minimization of an area error criterion. Computational results show that a unique and unambiguous set of parameter values can be obtained for each set of the experimental data points using the algorithm suggested. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/16.223700 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL ENGINEERING | |
dc.contributor.department | INSTITUTE OF MICROELECTRONICS | |
dc.description.doi | 10.1109/16.223700 | |
dc.description.sourcetitle | IEEE Transactions on Electron Devices | |
dc.description.volume | 40 | |
dc.description.issue | 8 | |
dc.description.page | 1417-1425 | |
dc.description.coden | IETDA | |
dc.identifier.isiut | A1993LN72600009 | |
Appears in Collections: | Staff Publications |
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