Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/62453
DC Field | Value | |
---|---|---|
dc.title | Nano-scale morphology and crystallography of laser-deposited TiN thin films | |
dc.contributor.author | Wang, H.-D. | |
dc.contributor.author | Lu, Y.-F. | |
dc.contributor.author | Mai, Z.-H. | |
dc.contributor.author | Ren, Z.-M. | |
dc.date.accessioned | 2014-06-17T06:51:12Z | |
dc.date.available | 2014-06-17T06:51:12Z | |
dc.date.issued | 2000-11 | |
dc.identifier.citation | Wang, H.-D.,Lu, Y.-F.,Mai, Z.-H.,Ren, Z.-M. (2000-11). Nano-scale morphology and crystallography of laser-deposited TiN thin films. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (11) : 6268-6271. ScholarBank@NUS Repository. | |
dc.identifier.issn | 00214922 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/62453 | |
dc.description.abstract | Titanium nitride (TIN) thin films were deposited on hydrogen-terminated silicon (100) substrates by pulsed laser ablation of a ceramic TiN target (purity: 99.9%). The crystallography and properties of the thin films are related to the substrate temperature. In the investigation, scanning tunneling microscopy (STM), X-ray diffraction (XRD) and nanoindentation were used. Nano-scale morphology of the thin films deposited at 600 °C was observed by STM using a platinum tip. The STM image showed that the TiN embryos have a uniform size of approximately 17 nm and grow into large clusters. The films grown at 600 °C have a full-width at half maximum of the TiN (200) peak in the XRD spectrum close to 0.50°. The hardness of the thin films deposited at 600 °C was as high as 26 GPa. | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL ENGINEERING | |
dc.description.sourcetitle | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | |
dc.description.volume | 39 | |
dc.description.issue | 11 | |
dc.description.page | 6268-6271 | |
dc.description.coden | JAPND | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.