Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0924-4247(99)00280-0
Title: Highly sensitive infrared temperature sensor using self-heating compensated microbolometers
Authors: Ramakrishna, M.V.S.
Karunasiri, G. 
Neuzil, P.
Sridhar, U.
Zeng, W.J.
Issue Date: 1-Feb-2000
Source: Ramakrishna, M.V.S.,Karunasiri, G.,Neuzil, P.,Sridhar, U.,Zeng, W.J. (2000-02-01). Highly sensitive infrared temperature sensor using self-heating compensated microbolometers. Sensors and Actuators, A: Physical 79 (2) : 122-127. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(99)00280-0
Abstract: This paper experimentally demonstrates a novel technique that drastically reduces the self-heating effect in microbolometers and which can be used to enhance the response due to infrared (IR). This is accomplished by using two bolometers with tailored thermal parameters, in particular, similar thermal mass but different thermal conductivity. Test devices with responsivity of over 6000 V/W at bias voltage of 3 V have been fabricated. Results indicate that this method is robust even under considerable mismatch of device parameters. We believe that this technique would pave way for realization of relatively simple, low cost and sensitive IR detectors for use in thermometry, imaging and other IR applications.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/62285
ISSN: 09244247
DOI: 10.1016/S0924-4247(99)00280-0
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