Please use this identifier to cite or link to this item: https://doi.org/10.1109/19.872918
Title: Geometrical error compensation of precision motion systems using radial basis function
Authors: Tan, K.K. 
Huang, S.N. 
Seet, H.L. 
Keywords: Geometrical error compensation
Precision motion control
Radial basis functions
Issue Date: Oct-2000
Source: Tan, K.K., Huang, S.N., Seet, H.L. (2000-10). Geometrical error compensation of precision motion systems using radial basis function. IEEE Transactions on Instrumentation and Measurement 49 (5) : 984-991. ScholarBank@NUS Repository. https://doi.org/10.1109/19.872918
Abstract: This paper describes a new method for geometrical error compensation of precision motion systems. The compensation is carried out with respect to an overall geometrical error model which is constructed from the individual error components associated with each axis of the machine. These error components are modeled using radial basis functions (RBFs), thus dispensing with the conventional look-up table. The adequacy and clear benefits of the proposed approach are illustrated from an application to an XY table. © 2000 IEEE.
Source Title: IEEE Transactions on Instrumentation and Measurement
URI: http://scholarbank.nus.edu.sg/handle/10635/62258
ISSN: 00189456
DOI: 10.1109/19.872918
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