Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62113
Title: Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
Authors: Choi, W.K. 
Han, K.K.
Chim, W.K. 
Keywords: Annealing
Metal-oxide-semiconductor structure
Silicon oxide
Sputtering
Issue Date: 1999
Source: Choi, W.K.,Han, K.K.,Chim, W.K. (1999). Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films. Thin Solid Films 343-344 (1-2) : 108-110. ScholarBank@NUS Repository.
Abstract: The effects of oxygen mixing and rapid thermal annealing (RTA) on the electrical properties of RF sputtered silicon oxide films has been examined. It was found that the insulating property of the sputtered oxide films improved when prepared with oxygen mixing in the sputtering gas and/or after rapid thermal annealing. For films RTA for 50 and 200 s, Schottky emission and space charge limited conduction were suggested as the transport mechanisms. The infrared results show that the film stoichiometry improved with RTA and/or oxygen mixing. © 1999 Elsevier Science S.A. All rights reserved.
Source Title: Thin Solid Films
URI: http://scholarbank.nus.edu.sg/handle/10635/62113
ISSN: 00406090
Appears in Collections:Staff Publications

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