Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0030-3992(01)00054-8
Title: Whole field surface roughness measurement by laser speckle correlation technique
Authors: Toh, S.L. 
Quan, C. 
Woo, K.C.
Tay, C.J. 
Shang, H.M. 
Keywords: ASC
Laser speckle correlation
Surface roughness
Issue Date: Sep-2001
Citation: Toh, S.L., Quan, C., Woo, K.C., Tay, C.J., Shang, H.M. (2001-09). Whole field surface roughness measurement by laser speckle correlation technique. Optics and Laser Technology 33 (6) : 427-434. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-3992(01)00054-8
Abstract: This paper describes a speckle correlation technique for the determination of surface roughness, ranging from 1.6 to 50 μm. Instead of moving the laser beam, the specimen is rotated to achieve angular speckle correlation (ASC) in the far-field plane. The technique is simple and requires minimum optical alignment. The experimental results show a good agreement with the standard specimen of known roughness. An error analysis on the experiment has been carried out. Together with the theoretical curves, the roughness values can be easily related to the change of incidence angle at a particular visibility of the correlation fringes between two speckle patterns. © 2001 Elsevier Science Ltd. All rights reserved.
Source Title: Optics and Laser Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/61700
ISSN: 00303992
DOI: 10.1016/S0030-3992(01)00054-8
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