Please use this identifier to cite or link to this item: https://doi.org/10.1364/AO.50.002246
Title: Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
Authors: Ma, S.
Quan, C. 
Zhu, R.
Tay, C.J. 
Chen, L.
Issue Date: 20-May-2011
Source: Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L. (2011-05-20). Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. Applied Optics 50 (15) : 2246-2254. ScholarBank@NUS Repository. https://doi.org/10.1364/AO.50.002246
Abstract: White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red-green-blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method. © 2011 Optical Society of America.
Source Title: Applied Optics
URI: http://scholarbank.nus.edu.sg/handle/10635/61435
ISSN: 00036935
DOI: 10.1364/AO.50.002246
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