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|Title:||Surface profile measurement in white-light scanning interferometry using a three-chip color CCD|
|Source:||Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L. (2011-05-20). Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. Applied Optics 50 (15) : 2246-2254. ScholarBank@NUS Repository. https://doi.org/10.1364/AO.50.002246|
|Abstract:||White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red-green-blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method. © 2011 Optical Society of America.|
|Source Title:||Applied Optics|
|Appears in Collections:||Staff Publications|
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