Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ijmachtools.2011.08.010
Title: Profile error compensation in fast tool servo diamond turning of micro-structured surfaces
Authors: Yu, D.P.
Hong, G.S. 
Wong, Y.S. 
Keywords: Diamond turning
Fast tool servo
Integral sliding mode control
Micro-structured surfaces
Profile error compensation
Sliding error
Issue Date: Jan-2012
Source: Yu, D.P., Hong, G.S., Wong, Y.S. (2012-01). Profile error compensation in fast tool servo diamond turning of micro-structured surfaces. International Journal of Machine Tools and Manufacture 52 (1) : 13-23. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2011.08.010
Abstract: There is increasing use of ultra-precision components with micro-structured surfaces in a range of areas such as optical, biological, medical, metrology artifacts and data storage. Fast tool servo (FTS) diamond turning is superior in machining precision and complicated micro-structured surfaces with wavelength above tens of microns. However, the component errors in the FTS diamond turning machine cause profile error to the machined micro-structured surfaces. In this paper, the main sources of component errors and their effect on the profile accuracy of the machined micro-structured surfaces are identified and analyzed. Compensation methods are proposed to accordingly modify the tool path for each component error to pre-compensate the induced profile errors. Typical micro-structured surfaces, e.g. sinusoidal wave along radial direction, sinusoidal wave along x direction and micro-lens array, were machined to show the effect of the component errors on profile accuracy and the effectiveness of the proposed compensation methods. © 2011 Elsevier Ltd. Allrightsreserved.
Source Title: International Journal of Machine Tools and Manufacture
URI: http://scholarbank.nus.edu.sg/handle/10635/61163
ISSN: 08906955
DOI: 10.1016/j.ijmachtools.2011.08.010
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