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|Title:||Optical micro-shadowgraph-based method for measuring micro-solderball height|
|Authors:||Wang, S. |
|Citation:||Wang, S., Quan, C., Tay, C.J. (2005-05). Optical micro-shadowgraph-based method for measuring micro-solderball height. Optical Engineering 44 (5) : 1-2. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1906003|
|Abstract:||An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. © 2005 Society of Photo-Optical Instrumentation Engineers.|
|Source Title:||Optical Engineering|
|Appears in Collections:||Staff Publications|
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