Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.1906003
Title: Optical micro-shadowgraph-based method for measuring micro-solderball height
Authors: Wang, S. 
Quan, C. 
Tay, C.J. 
Keywords: Geometrical optics
Metrology
Micro-solderballs
Microscopy
Optical shadowgraphs
Semiconductor wafers
Issue Date: May-2005
Source: Wang, S., Quan, C., Tay, C.J. (2005-05). Optical micro-shadowgraph-based method for measuring micro-solderball height. Optical Engineering 44 (5) : 1-2. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1906003
Abstract: An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. © 2005 Society of Photo-Optical Instrumentation Engineers.
Source Title: Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/61010
ISSN: 00913286
DOI: 10.1117/1.1906003
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