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|Title:||Novel InP-based optical MEMS device|
|Authors:||Tay, C.J. |
|Keywords:||InP-based Fabry-Perot membranes|
|Source:||Tay, C.J., Akkipeddi, R., Gopal, M. (2008). Novel InP-based optical MEMS device. Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.2959175|
|Abstract:||We present a method for the design and fabrication of InPbased free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry-Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses. © 2008 Society of Photo-Optical Instrumentation Engineers.|
|Source Title:||Journal of Micro/ Nanolithography, MEMS, and MOEMS|
|Appears in Collections:||Staff Publications|
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