Please use this identifier to cite or link to this item: https://doi.org/10.1364/OE.15.010958
Title: Nondispersive optical phase shifter array using microelectromechanical systems based gratings
Authors: Zhou, G. 
Chau, F.S. 
Issue Date: 20-Aug-2007
Source: Zhou, G.,Chau, F.S. (2007-08-20). Nondispersive optical phase shifter array using microelectromechanical systems based gratings. Optics Express 15 (17) : 10958-10963. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.15.010958
Abstract: We present a broadband nondispersive optical phase shifter array based on microelectromechanical systems (MEMS) technology. The device consists of an array of micro-grating elements. Each grating element utilizes an in-plane translational motion to produce a phase shift to the diffracted light beam. The phase shift is dependent only on the ratio of the grating displacement to its period, and thus independent of incident wavelength. The proposed operation principle was demonstrated with a prototype device developed using a silicon-on-insulator (SOI) micromachining process. This MEMS nondispersive phase-shifter array may be useful in many multispectral applications including broadband optical phased arrays. © 2007 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/60888
ISSN: 10944087
DOI: 10.1364/OE.15.010958
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