Please use this identifier to cite or link to this item: https://doi.org/5/303
Title: Macro-modelling of a double-gimballed electrostatic torsional micromirror
Authors: Zhou, G. 
Tay, F.E.H. 
Chau, F.S. 
Issue Date: Sep-2003
Source: Zhou, G.,Tay, F.E.H.,Chau, F.S. (2003-09). Macro-modelling of a double-gimballed electrostatic torsional micromirror. Journal of Micromechanics and Microengineering 13 (5) : 532-547. ScholarBank@NUS Repository. https://doi.org/5/303
Abstract: This paper presents the development of a reduced-order macro-model for the double-gimballed electrostatic torsional micromirror using the hierarchical circuit-based approach. The proposed macro-model permits extremely fast simulation while providing nearly FEM accuracy. The macro-model is coded in MAST analog hardware description language (AHDL), and the simulations are implemented in the SABER™ simulator. Both the static and dynamic behaviour of the double-gimballed electrostatic torsional micromirror have been investigated. The dc and frequency analysis results obtained by the proposed macro-model are in good agreement with CoventorWare™ finite element analysis results. Based on the macro-model we developed, system-level simulation of a closed-loop controlled double-gimballed torsional micromirror is also performed. Decentralized PID controllers are proposed for the control of the micromirror. A sequential-loop-closing method is used for tuning the multiple control loops during the simulation. After tuning, the closed-loop controlled double-gimballed torsional micromirror demonstrates an improved transient performance and satisfactory disturbance rejection ability.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/60666
ISSN: 09601317
DOI: 5/303
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