Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2004.11.035
Title: Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser
Authors: Tan, A.W.Y.
Tay, F.E.H. 
Keywords: Eutectic
Gold-tin
Laser bonding
Low temperature
Packaging
Single crystal quartz-to-silicon
Issue Date: 17-May-2005
Source: Tan, A.W.Y.,Tay, F.E.H. (2005-05-17). Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser. Sensors and Actuators, A: Physical 120 (2) : 550-561. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.11.035
Abstract: A localized laser assisted eutectic bonding process to bond 80 μm thick single crystal quartz chips to silicon substrates has been successfully developed and characterized. The two bond partners are bonded via intermediate layers of Cr, Au and Sn, with the composition of Au:Sn set close to 80:20 wt.%. Laser light source from the Nd:YAG Q-switched laser processing system with a wavelength of 355 nm, a spot diameter of 25 μm and variable power up to a maximum of 2 W is used as the energy source to initiate bonding at any user-defined region(s). Effects of important laser process parameters, such as laser power, scanning velocity and repetition rate on bond strength, interface quality and heat affected zones are investigated and documented. The resultant bonds are forcefully pulled apart to measure their bond strength. Optimal mean bond strength of 15.14 MPa is recorded for 355 nm wavelength at parameters combinations with highest laser power within the fluence window and low scanning velocity. © 2004 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/60656
ISSN: 09244247
DOI: 10.1016/j.sna.2004.11.035
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

35
checked on Dec 13, 2017

WEB OF SCIENCETM
Citations

26
checked on Oct 31, 2017

Page view(s)

34
checked on Dec 9, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.