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Title: Investigation of a dual-layer structure using vertical scanning interferometry
Authors: Tay, C.J. 
Quan, C. 
Li, M.
Keywords: Continuous wavelet transform (CWT)
Dual-layer structure
Vertical scanning interferometry (VSI)
Issue Date: Aug-2007
Source: Tay, C.J., Quan, C., Li, M. (2007-08). Investigation of a dual-layer structure using vertical scanning interferometry. Optics and Lasers in Engineering 45 (8) : 907-913. ScholarBank@NUS Repository.
Abstract: This paper proposes a method based on white light vertical scanning interferometry (VSI) to investigate a dual-layer structure. The optical arrangement is based on a modified Michelson interferometer that utilizes a reference beam and two object beams. Each object beam interferes with the reference beam and produces an interferogram. A series of interferograms are obtained on a dual-layer structure and the thickness of each layer is obtained. A continuous wavelet transform (CWT) is used to extract the envelope of each interferogram in order to determine the peak intensity that provides an indication of each layer's boundary. Tests are conducted on a semiconductor wafer and a micro-gear made of polymeric material deposited on a metal substrate. Results show that the proposed method has a good potential for investigating a dual-layer micro-structure. © 2007 Elsevier Ltd. All rights reserved.
Source Title: Optics and Lasers in Engineering
ISSN: 01438166
DOI: 10.1016/j.optlaseng.2007.01.007
Appears in Collections:Staff Publications

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