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|Title:||High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating|
|Authors:||Zhou, G. |
|Source:||Zhou, G.,Du, Y.,Zhang, Q.,Feng, H.,Chau, F.S. (2008-08-01). High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/8/085013|
|Abstract:||In this paper, we report the modeling, fabrication and characterization of a microelectromechanical systems (MEMS)-based sub-wavelength diffraction grating under in-plane motion for high-optical-efficiency high-speed laser-scanning applications. The scanner utilizes in-plane rotational vibration of a planar microstructure to change the orientation of the diffraction grating, hence causing a diffracted laser beam to scan with less dynamic wavefront deformation as compared with conventional scanning micromirrors. An optical efficiency of more than 75% is experimentally achieved with a simple gold-coated binary sub-wavelength grating. When operated in air and electrostatically driven by 45 V dc bias and 84 V peak-to-peak ac voltages, the 1 mm diameter grating is capable of scanning an optical scan angle of 13.7°with a 632.8 nm wavelength incident laser beam at a resonant frequency of 20.35 kHz. The measured optical resolution is around 310 pixels per unidirectional scan. © 2008 IOP Publishing Ltd.|
|Source Title:||Journal of Micromechanics and Microengineering|
|Appears in Collections:||Staff Publications|
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