Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/18/8/085013
Title: High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating
Authors: Zhou, G. 
Du, Y. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Issue Date: 1-Aug-2008
Citation: Zhou, G., Du, Y., Zhang, Q., Feng, H., Chau, F.S. (2008-08-01). High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/8/085013
Abstract: In this paper, we report the modeling, fabrication and characterization of a microelectromechanical systems (MEMS)-based sub-wavelength diffraction grating under in-plane motion for high-optical-efficiency high-speed laser-scanning applications. The scanner utilizes in-plane rotational vibration of a planar microstructure to change the orientation of the diffraction grating, hence causing a diffracted laser beam to scan with less dynamic wavefront deformation as compared with conventional scanning micromirrors. An optical efficiency of more than 75% is experimentally achieved with a simple gold-coated binary sub-wavelength grating. When operated in air and electrostatically driven by 45 V dc bias and 84 V peak-to-peak ac voltages, the 1 mm diameter grating is capable of scanning an optical scan angle of 13.7°with a 632.8 nm wavelength incident laser beam at a resonant frequency of 20.35 kHz. The measured optical resolution is around 310 pixels per unidirectional scan. © 2008 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/60453
ISSN: 09601317
DOI: 10.1088/0960-1317/18/8/085013
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