Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2006.872234
Title: Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
Authors: Zhou, G. 
Chau, F.S. 
Keywords: Displacement sensing
Grating light modulation
Interferometer
Microactuators
Microelectromechanical systems (MEMS)
Issue Date: Apr-2006
Source: Zhou, G.,Chau, F.S. (2006-04). Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices. Journal of Microelectromechanical Systems 15 (2) : 388-395. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2006.872234
Abstract: In this paper, we present an optical sensing method that is capable of detection of both in-plane and out-of-plane translational motions of a micromachined structure that incorporates a diffraction grating. In the proposed method, the out-of-plane displacement sensing is based on optical intensity modulation of a phase-sensitive diffraction grating, while the in-plane displacement sensing is based on a modified grating interferometry. Preliminary experimental results on a surface micromachined grating structure fabricated within the shuttle of a comb-drive resonator demonstrate an in-plane resolution of 0.23 nm/ √Hz and an out-of-plane resolution of 0.03 nm/ √Hz in a 1 Hz bandwidth centered at 950 Hz. The proposed method can be configured for many promising applications, including optically interrogated high sensitive single/dual-axis microaccelerometers or gyroscopes. © 2006 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/60419
ISSN: 10577157
DOI: 10.1109/JMEMS.2006.872234
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

12
checked on Dec 13, 2017

WEB OF SCIENCETM
Citations

10
checked on Nov 2, 2017

Page view(s)

31
checked on Dec 16, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.