Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1380398
Title: Force based displacement measurement in micromechanical devices
Authors: O'Shea, S.J.
Ng, C.K.
Tan, Y.Y.
Xu, Y.
Tay, E.H. 
Chua, B.L.
Tien, N.C.
Tang, X.S.
Chen, W.T.
Issue Date: 18-Jun-2001
Source: O'Shea, S.J.,Ng, C.K.,Tan, Y.Y.,Xu, Y.,Tay, E.H.,Chua, B.L.,Tien, N.C.,Tang, X.S.,Chen, W.T. (2001-06-18). Force based displacement measurement in micromechanical devices. Applied Physics Letters 78 (25) : 4031-4033. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1380398
Abstract: We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/60355
ISSN: 00036951
DOI: 10.1063/1.1380398
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