Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2006.02.027
Title: Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
Authors: Zhao, Y.
Tay, F.E.H. 
Zhou, G. 
Chau, F.S. 
Keywords: Dual-axis micromirror
MEMS
Multi-loop control
Positioning
Issue Date: 20-Nov-2006
Source: Zhao, Y., Tay, F.E.H., Zhou, G., Chau, F.S. (2006-11-20). Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control. Sensors and Actuators, A: Physical 132 (2) : 421-428. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.02.027
Abstract: Fast and precise positioning is of great importance for electrostatically actuated dual-axis micromirror. However, this device suffers from long settling time and large cross-axis coupling. This paper reports a multi-loop digital control method to improve the positioning performance. The system is identified and a multi-loop proportional, integral and derivative (PID) controller is designed. Both the simulation and experimental results show a significant improvement for the positioning speed and precision. The settling time is shortened from 15 to 5 ms and 24 to 3 ms for x-axis and y-axis rotation, respectively. The cross-axis coupling is suppressed to a negligible level. Less than 5% maximum positioning error is obtained. © 2006 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/60294
ISSN: 09244247
DOI: 10.1016/j.sna.2006.02.027
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