Please use this identifier to cite or link to this item:
|Title:||Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control|
|Citation:||Zhao, Y., Tay, F.E.H., Zhou, G., Chau, F.S. (2006-11-20). Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control. Sensors and Actuators, A: Physical 132 (2) : 421-428. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.02.027|
|Abstract:||Fast and precise positioning is of great importance for electrostatically actuated dual-axis micromirror. However, this device suffers from long settling time and large cross-axis coupling. This paper reports a multi-loop digital control method to improve the positioning performance. The system is identified and a multi-loop proportional, integral and derivative (PID) controller is designed. Both the simulation and experimental results show a significant improvement for the positioning speed and precision. The settling time is shortened from 15 to 5 ms and 24 to 3 ms for x-axis and y-axis rotation, respectively. The cross-axis coupling is suppressed to a negligible level. Less than 5% maximum positioning error is obtained. © 2006 Elsevier B.V. All rights reserved.|
|Source Title:||Sensors and Actuators, A: Physical|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 17, 2018
WEB OF SCIENCETM
checked on May 16, 2018
checked on May 25, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.