Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.ijthermalsci.2006.08.002
DC Field | Value | |
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dc.title | Fabrication, modeling and testing of a thin film Au/Ti microheater | |
dc.contributor.author | Zhang, K.L. | |
dc.contributor.author | Chou, S.K. | |
dc.contributor.author | Ang, S.S. | |
dc.date.accessioned | 2014-06-17T06:21:29Z | |
dc.date.available | 2014-06-17T06:21:29Z | |
dc.date.issued | 2007-06 | |
dc.identifier.citation | Zhang, K.L., Chou, S.K., Ang, S.S. (2007-06). Fabrication, modeling and testing of a thin film Au/Ti microheater. International Journal of Thermal Sciences 46 (6) : 580-588. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijthermalsci.2006.08.002 | |
dc.identifier.issn | 12900729 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/60291 | |
dc.description.abstract | A thin film gold/titanium (Au/Ti) microheater is developed for microthruster ignition, micro explosive boiling, and micro sensor applications. The microheater was fabricated onto a Pyrex bulk substrate using a micro-fabrication technology. A finite-element based electro-thermal modeling was employed to predict the microheater performance. The variations of the microheater temperature with time, space, and power supply are determined from the modeling. A method is presented to determine the thin film Au/Ti electrical resistivity and thermal conductivity. It was found that significant differences exist between heat transfer in microheater and conventional heater. Experimental testing of the microheater temperature was performed using a customized circuitry. The finite-element model is validated by the experimental measurements. © 2006 Elsevier Masson SAS. All rights reserved. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.ijthermalsci.2006.08.002 | |
dc.source | Scopus | |
dc.subject | Au/Ti | |
dc.subject | Experiment | |
dc.subject | Microheater | |
dc.subject | Modeling | |
dc.subject | Thin film | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1016/j.ijthermalsci.2006.08.002 | |
dc.description.sourcetitle | International Journal of Thermal Sciences | |
dc.description.volume | 46 | |
dc.description.issue | 6 | |
dc.description.page | 580-588 | |
dc.description.coden | RGTHA | |
dc.identifier.isiut | 000246046900007 | |
Appears in Collections: | Staff Publications |
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