Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ijthermalsci.2006.08.002
Title: Fabrication, modeling and testing of a thin film Au/Ti microheater
Authors: Zhang, K.L.
Chou, S.K. 
Ang, S.S.
Keywords: Au/Ti
Experiment
Microheater
Modeling
Thin film
Issue Date: Jun-2007
Source: Zhang, K.L.,Chou, S.K.,Ang, S.S. (2007-06). Fabrication, modeling and testing of a thin film Au/Ti microheater. International Journal of Thermal Sciences 46 (6) : 580-588. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijthermalsci.2006.08.002
Abstract: A thin film gold/titanium (Au/Ti) microheater is developed for microthruster ignition, micro explosive boiling, and micro sensor applications. The microheater was fabricated onto a Pyrex bulk substrate using a micro-fabrication technology. A finite-element based electro-thermal modeling was employed to predict the microheater performance. The variations of the microheater temperature with time, space, and power supply are determined from the modeling. A method is presented to determine the thin film Au/Ti electrical resistivity and thermal conductivity. It was found that significant differences exist between heat transfer in microheater and conventional heater. Experimental testing of the microheater temperature was performed using a customized circuitry. The finite-element model is validated by the experimental measurements. © 2006 Elsevier Masson SAS. All rights reserved.
Source Title: International Journal of Thermal Sciences
URI: http://scholarbank.nus.edu.sg/handle/10635/60291
ISSN: 12900729
DOI: 10.1016/j.ijthermalsci.2006.08.002
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