Please use this identifier to cite or link to this item: https://doi.org/10.1023/A:1024824818808
Title: Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
Authors: Chan, M.L.
Tay, F.E.H. 
Logeeswaran, V.J. 
Zeng, K.Y.
Shen, L.
Chau, F.S. 
Keywords: Bending test
Cantilever
Microgyroscope
Nanoindentation
Spring constant
Issue Date: Oct-2003
Source: Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S. (2003-10). Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method. Analog Integrated Circuits and Signal Processing 37 (1) : 45-56. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1024824818808
Abstract: A rapid and accurate static and quasi-static method for determining the out-of-plane spring constants of cantilevers and a micromachined vibratory sensor is presented. In the past much of the effort in nanoindentation application was to investigate the thin-film mechanical properties. In this paper, we have utilized the nanoindentation method to measure directly some micromachined device (e.g. microgyroscope) spring constants. The cantilevers and devices tested were fabricated using the MUMPS process and an SOI process (patent pending). Spring constants are determined using a commercial nanoindentation apparatus UMIS-2000 configured with both Berkovich and spherical indenter tip that can be placed onto the device with high accuracy. Typical load resolution is: 20 μN to 0.5 N and a displacement resolution of 0.05 nm. Information was deduced from the penetration depth versus load curves during both loading and unloading.
Source Title: Analog Integrated Circuits and Signal Processing
URI: http://scholarbank.nus.edu.sg/handle/10635/60238
ISSN: 09251030
DOI: 10.1023/A:1024824818808
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