Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.462877
Title: Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
Authors: Chan, M.L.
Tay, F.E.H. 
Logeeswaran, V.J. 
Zeng, K.Y. 
Shen, L.
Chau, F.S. 
Keywords: And cantilever
Bending test
Microgyroscope
Nanoindentation
Spring constant
Issue Date: 2002
Source: Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S. (2002). Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 726-735. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462877
Abstract: A rapid and accurate static and quasi-static method for determining the out-of-plane spring constants of cantilevers and a micromachined vibratory sensor is presented. In the past much of the effort in nanoindentation application was to investigate the thin-film mechanical properties. In this paper, we have utilized the nanoindentation method to measure directly some micromachined device (e.g. microgyroscope) spring constants. The cantilevers and devices tested were fabricated using the MUMPS process and an SOI process (patent pending). Spring constants are determined using a commercial nanoindentation apparatus UMIS-2000 configured with both Berkovich and spherical indenter tip that can be placed onto the device with high accuracy. Typical load resolution is: 20μN to 0.5N and a displacement resolution of 0.05nm. Information was deduced from the penetration depth versus load curves during both loading & unloading.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/60237
ISSN: 0277786X
DOI: 10.1117/12.462877
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