Please use this identifier to cite or link to this item: https://doi.org/10.1109/LPT.2013.2249057
Title: Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging
Authors: Mu, X.
Zhou, G. 
Yu, H.
Tsai, J.M.-L.
Neo, W.K.
Kumar, A.S. 
Chau, F.S. 
Keywords: Diamond turning
micro-assembly
microelectromechanical systems
optical coherence tomography
resonating micro-scanners
soft lithography
Issue Date: 2013
Source: Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S. (2013). Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging. IEEE Photonics Technology Letters 25 (8) : 749-752. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2013.2249057
Abstract: An electrostatic actuation-based resonating microelectromechanical systems (MEMS) polygonal mirror micro-scanner is developed for endoscopic probes used in clinical investigations. Microassembly technology is utilized to construct this device, which consists of a micro-actuator of four sets of electrostatic comb-drive resonators and an eight-slanted-facet highly reflective pyramidal polygon micro-reflector. The pyramidal polygon micro-reflector is developed using high precision diamond turning and soft lithography molding technologies. An optical scan angle of near-360 degrees is achieved at a resonant frequency of 180 Hz when driven by electrostatic comb-drive resonators with 80 Vpp ac voltage. © 1989-2012 IEEE.
Source Title: IEEE Photonics Technology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/60155
ISSN: 10411135
DOI: 10.1109/LPT.2013.2249057
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