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|Title:||Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging|
optical coherence tomography
|Citation:||Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S. (2013). Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging. IEEE Photonics Technology Letters 25 (8) : 749-752. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2013.2249057|
|Abstract:||An electrostatic actuation-based resonating microelectromechanical systems (MEMS) polygonal mirror micro-scanner is developed for endoscopic probes used in clinical investigations. Microassembly technology is utilized to construct this device, which consists of a micro-actuator of four sets of electrostatic comb-drive resonators and an eight-slanted-facet highly reflective pyramidal polygon micro-reflector. The pyramidal polygon micro-reflector is developed using high precision diamond turning and soft lithography molding technologies. An optical scan angle of near-360 degrees is achieved at a resonant frequency of 180 Hz when driven by electrostatic comb-drive resonators with 80 Vpp ac voltage. © 1989-2012 IEEE.|
|Source Title:||IEEE Photonics Technology Letters|
|Appears in Collections:||Staff Publications|
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