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Title: Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities
Authors: Chew, X.
Zhou, G. 
Chau, F.S. 
Deng, J.
Tang, X.
Loke, Y.C.
Issue Date: 1-Aug-2010
Source: Chew, X., Zhou, G., Chau, F.S., Deng, J., Tang, X., Loke, Y.C. (2010-08-01). Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities. Optics Letters 35 (15) : 2517-2519. ScholarBank@NUS Repository.
Abstract: We present dynamic tuning or optical resonance using microelectromechanical systems (MEMS)-driven coupled photonic crystal (PhC) nanocavities. The device consists of an air-suspended one-dimensional PhC nanocavity coupled to input and output waveguides and a perturbing nanocavity attached to a submicrometer MEMS comb drive. Resonance tuning is achieved through varying the gap between the two coupled cavities. We demonstrate experimentally that resonance can be tuned up to 8 nm with no significant deterioration in the Q factor. The proposed mechanism potentially enables a new platform of on-chip photonic devices that can achieve a large tuning range with low power and small footprint and may find useful applications in tunable optical/photonic devices. © 2010 Optical Society of America.
Source Title: Optics Letters
ISSN: 01469592
DOI: 10.1364/OL.35.002517
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