Please use this identifier to cite or link to this item: https://doi.org/10.1088/1742-6596/34/1/067
Title: Development of scanning micromirror with discrete steering angles
Authors: Wang, Z.F.
Noell, W.
Zickar, M.
De Rooij, N.F.
Lim, S.P. 
Issue Date: 1-Apr-2006
Citation: Wang, Z.F., Noell, W., Zickar, M., De Rooij, N.F., Lim, S.P. (2006-04-01). Development of scanning micromirror with discrete steering angles. Journal of Physics: Conference Series 34 (1) : 410-416. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/067
Abstract: This paper describes the development of a new MEMS-based optical mirror, which can perform optical switching (or scanning) function with discrete reflection angles in an outof- plane configuration. The device is fabricated through the Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by wafer dicing and assembly with two metalised glass dies. The MEMS mirror can be tilted under electrostatic force between the opposite electrodes embedded on SOI and glass structures. The most outstanding feature of this MEMS mirror is the discrete and therefore, reliable tilting angles, which generated by its unique mechanical structural design and electrostatic-driven mechanism. In this paper, the concept of the new scanning mirror is presented, followed by the introduction of device design, mechanical simulation, microfabrication process, assembly solution, and some testing results. The potential applications of this new MEMS mirror include optical scanning, optical sensing (or detection), and optical switching. © 2006 IOP Publishing Ltd.
Source Title: Journal of Physics: Conference Series
URI: http://scholarbank.nus.edu.sg/handle/10635/59943
ISSN: 17426588
DOI: 10.1088/1742-6596/34/1/067
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