Please use this identifier to cite or link to this item:
|Title:||Design and optimization of dual optical fiber MEMS pressure sensor for biomedical applications|
|Authors:||Dagang, G. |
|Citation:||Dagang, G., Po, S.N.C., Hock, F.T.E., Rongming, L. (2006-04-01). Design and optimization of dual optical fiber MEMS pressure sensor for biomedical applications. Journal of Physics: Conference Series 34 (1) : 1073-1078. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/177|
|Abstract:||A novel Single Deeply Corrugated Diaphragm (SDCD) based dual optical fiber Fabry-Perot pressure sensor for blood pressure measurement is proposed. Both mechanical and optical simulations are performed to demonstrate the feasibility and superior performance of the proposed sensor. Result shows that less than 2% nonlinearity can be achieved for the proposed sensor using optimal Fabry-Perot microcavity. Also, the fabrication process of the proposed sensor is given, instead of complicated fusion bonding process, only bulk and surface micromachining techniques are required which facilitate the mass production of such biocompatible and disposable pressure sensors. © 2006 IOP Publishing Ltd.|
|Source Title:||Journal of Physics: Conference Series|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 17, 2018
WEB OF SCIENCETM
checked on Sep 5, 2018
checked on Sep 7, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.