Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.1525795
Title: Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
Authors: Quan, C. 
Wang, S.H. 
Tay, C.J. 
Liu, A.Q.
Shang, H.M. 
Keywords: Laser interferometry
Membrane
Micro-rf switches
Nondestructive evaluation
Issue Date: Jan-2003
Source: Quan, C., Wang, S.H., Tay, C.J., Liu, A.Q., Shang, H.M. (2003-01). Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry. Optical Engineering 42 (1) : 92-97. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1525795
Abstract: We have developed a measurement method to evaluate deformation of a metallic membrane (thickness 2 μm) in a micro-radio-frequency switch. The method is based on a modified Michelson interferometer incorporated with optoelectronic devices including a He-Ne laser, conventional optics, a CCD sensor, and a photodiode. To detect the deformation of the membrane in the rf switch, a He-Ne laser probe 10 μm in diameter is directed onto the specimen. The laser beam reflected off the membrane is combined with a reference beam. The combined laser beams are regulated to follow a common path. The resulting circular interference fringe pattern is simultaneously recorded by a CCD sensor and a photodiode. The deformation of the membrane is determined from the order of the resulting fringe pattern. As demonstrated by the experimental results, the proposed method is capable of measuring deformation of the rf switch at submicron levels.
Source Title: Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/59848
ISSN: 00913286
DOI: 10.1117/1.1525795
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