Please use this identifier to cite or link to this item: https://doi.org/10.1364/OE.20.006325
Title: Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe
Authors: Mu, X.
Zhou, G. 
Yu, H. 
Du, Y. 
Feng, H.
Tsai, J.M.L.
Chau, F.S. 
Issue Date: 12-Mar-2012
Source: Mu, X., Zhou, G., Yu, H., Du, Y., Feng, H., Tsai, J.M.L., Chau, F.S. (2012-03-12). Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe. Optics Express 20 (6) : 6325-6339. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.20.006325
Abstract: A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevronbeam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection. © 2012 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/59732
ISSN: 10944087
DOI: 10.1364/OE.20.006325
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