Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/57537
Title: Study of hybrid driven micromirrors for 3-D variable optical attenuator applications
Authors: Koh, K.H.
Soon, B.W.
Tsai, J.M.
Danner, A.J. 
Lee, C. 
Issue Date: 10-Sep-2012
Source: Koh, K.H.,Soon, B.W.,Tsai, J.M.,Danner, A.J.,Lee, C. (2012-09-10). Study of hybrid driven micromirrors for 3-D variable optical attenuator applications. Optics Express 20 (19) : 21598-21611. ScholarBank@NUS Repository.
Abstract: Aluminium-coated micromirrors driven by electrothermal and electromagnetic actuations have been demonstrated for 3-D variable optical attenuation applications. Three types of attenuation schemes based on electrothermal, electromagnetic and hybrid, i.e. combination of electrothermal and electromagnetic, actuations have been developed. In addition, two different designs have been fabricated and characterized to investigate the effects of the variations made to both the actuators on the optical attenuation performances of the micromirror. Our unique design of using both ET and EM actuators simultaneously to achieve attenuation is the first demonstration of such hybrid driven CMOS compatible MEMS VOA device. © 2012 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/57537
ISSN: 10944087
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

16
checked on Dec 15, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.