Please use this identifier to cite or link to this item:
|Title:||Spot focus size effect in spectroscopic ellipsometry of thin films|
|Source:||Ng, T.W., Tay, A., Wang, Y. (2009-01-15). Spot focus size effect in spectroscopic ellipsometry of thin films. Optics Communications 282 (2) : 172-176. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optcom.2008.09.081|
|Abstract:||A focused as opposed to collimated light beam is typically used as probe in order to achieve a smaller as well as more intense light interrogation area in spectroscopic ellipsometry of thin films. In this work, we performed geometric ray analysis at the illumination and recording ends of such a system. The numerical results revealed substantial changes in (i) average optical path length and (ii) optical path length differences, which varied according to wavelength despite the film thickness remaining uniform. These results were able to consistently explain the anomalies found when different focus probe beam sizes were used in experimental spectroscopic ellipsometry measurements. © 2008 Elsevier B.V. All rights reserved.|
|Source Title:||Optics Communications|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Mar 8, 2018
WEB OF SCIENCETM
checked on Feb 14, 2018
checked on Mar 12, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.