Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.optcom.2008.09.081
Title: Spot focus size effect in spectroscopic ellipsometry of thin films
Authors: Ng, T.W.
Tay, A. 
Wang, Y.
Keywords: Ellipsometry
Geometrical optics
Wafer film
Issue Date: 15-Jan-2009
Source: Ng, T.W., Tay, A., Wang, Y. (2009-01-15). Spot focus size effect in spectroscopic ellipsometry of thin films. Optics Communications 282 (2) : 172-176. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optcom.2008.09.081
Abstract: A focused as opposed to collimated light beam is typically used as probe in order to achieve a smaller as well as more intense light interrogation area in spectroscopic ellipsometry of thin films. In this work, we performed geometric ray analysis at the illumination and recording ends of such a system. The numerical results revealed substantial changes in (i) average optical path length and (ii) optical path length differences, which varied according to wavelength despite the film thickness remaining uniform. These results were able to consistently explain the anomalies found when different focus probe beam sizes were used in experimental spectroscopic ellipsometry measurements. © 2008 Elsevier B.V. All rights reserved.
Source Title: Optics Communications
URI: http://scholarbank.nus.edu.sg/handle/10635/57497
ISSN: 00304018
DOI: 10.1016/j.optcom.2008.09.081
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