Please use this identifier to cite or link to this item: https://doi.org/10.1149/1.2436989
Title: Spectroscopic ellipsometry investigation of nickel germanide formation
Authors: Zhang, Q.
Han, C.W.
Zhu, C. 
Issue Date: 2007
Citation: Zhang, Q., Han, C.W., Zhu, C. (2007). Spectroscopic ellipsometry investigation of nickel germanide formation. Journal of the Electrochemical Society 154 (4) : H314-H317. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2436989
Abstract: In this work, the formation of nickel germanide is investigated by spectroscopic ellipsometry. The phase transition and thickness of nickel germanide were identified nondestructively by spectroscopic ellipsometry. The results were compared with traditional analytical tools such as four point probe, Rutherford backscattering spectrometry, and X-ray photoelectron spectroscopy, and showed good agreement. The optical properties (refractive index) of nickel germanide were obtained from spectroscopic ellipsometer measurements and applied to the thickness measurement of nickel germanide successfully. © 2007 The Electrochemical Society.
Source Title: Journal of the Electrochemical Society
URI: http://scholarbank.nus.edu.sg/handle/10635/57466
ISSN: 00134651
DOI: 10.1149/1.2436989
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