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|Title:||Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes|
|Citation:||Oon, C.H., Thong, J.T.L. (2008-11-12). Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes. Nanotechnology 19 (45) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/19/45/455305|
|Abstract:||We propose a new simple, low-cost method for providing all-round metal contacts to one-dimensional structures such as carbon nanotubes and nanowires on a transparent substrate. The nanostructures are first positioned in place to bridge a electrode gap by dielectrophoresis. The electrode structure is then used as a self-aligned mask during the subsequent photolithography through illumination from the substrate backside. This is followed by metallization and lift-off. Our measurements on multi-walled carbon nanotubes thus contacted show reasonable yield and good electrical contacts for the process carried out on a glass slide as the substrate. © IOP Publishing Ltd.|
|Appears in Collections:||Staff Publications|
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