Please use this identifier to cite or link to this item: https://doi.org/45/455305
Title: Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes
Authors: Oon, C.H.
Thong, J.T.L. 
Issue Date: 12-Nov-2008
Source: Oon, C.H.,Thong, J.T.L. (2008-11-12). Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes. Nanotechnology 19 (45) : -. ScholarBank@NUS Repository. https://doi.org/45/455305
Abstract: We propose a new simple, low-cost method for providing all-round metal contacts to one-dimensional structures such as carbon nanotubes and nanowires on a transparent substrate. The nanostructures are first positioned in place to bridge a electrode gap by dielectrophoresis. The electrode structure is then used as a self-aligned mask during the subsequent photolithography through illumination from the substrate backside. This is followed by metallization and lift-off. Our measurements on multi-walled carbon nanotubes thus contacted show reasonable yield and good electrical contacts for the process carried out on a glass slide as the substrate. © IOP Publishing Ltd.
Source Title: Nanotechnology
URI: http://scholarbank.nus.edu.sg/handle/10635/57406
ISSN: 09574484
DOI: 45/455305
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