Please use this identifier to cite or link to this item:
|Title:||Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes|
|Citation:||Oon, C.H., Thong, J.T.L. (2008-11-12). Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes. Nanotechnology 19 (45) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/19/45/455305|
|Abstract:||We propose a new simple, low-cost method for providing all-round metal contacts to one-dimensional structures such as carbon nanotubes and nanowires on a transparent substrate. The nanostructures are first positioned in place to bridge a electrode gap by dielectrophoresis. The electrode structure is then used as a self-aligned mask during the subsequent photolithography through illumination from the substrate backside. This is followed by metallization and lift-off. Our measurements on multi-walled carbon nanotubes thus contacted show reasonable yield and good electrical contacts for the process carried out on a glass slide as the substrate. © IOP Publishing Ltd.|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 20, 2018
WEB OF SCIENCETM
checked on Sep 10, 2018
checked on Sep 22, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.