Please use this identifier to cite or link to this item:
Title: Silicon two-dimensional phononic crystal resonators using alternate defects
Authors: Wang, N.
Hsiao, F.-L. 
Palaniapan, M. 
Lee, C. 
Issue Date: 5-Dec-2011
Citation: Wang, N., Hsiao, F.-L., Palaniapan, M., Lee, C. (2011-12-05). Silicon two-dimensional phononic crystal resonators using alternate defects. Applied Physics Letters 99 (23) : -. ScholarBank@NUS Repository.
Abstract: We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch. © 2011 American Institute of Physics.
Source Title: Applied Physics Letters
ISSN: 00036951
DOI: 10.1063/1.3665956
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Oct 15, 2018


checked on Oct 15, 2018

Page view(s)

checked on Oct 13, 2018

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.