Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2190208
Title: Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes
Authors: Luo, T. 
Khursheed, A. 
Issue Date: 2006
Source: Luo, T., Khursheed, A. (2006). Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes. Review of Scientific Instruments 77 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2190208
Abstract: At present transmission electron energy loss spectrum (EELS) analysis is only carried out in dedicated research instruments such as transmission electron microscopes (TEMs) or scanning transmission electron microscopes. This article presents a new design of second-order geometric aberration corrected EELS spectrometer attachment using split plates, which enables conventional scanning electron microscopes (SEMs) to provide TEM-like EELS spectra. Correction to a third-order dominant geometric aberration pattern has been achieved, which indicates that most of the second-order geometric aberration component is eliminated. This second-order aberration corrected spectrometer attachment design can enable SEMs to provide transmission EELS spectrums. © 2006 American Institute of Physics.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/57344
ISSN: 00346748
DOI: 10.1063/1.2190208
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