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|Title:||Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes|
|Authors:||Luo, T. |
|Citation:||Luo, T., Khursheed, A. (2006). Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes. Review of Scientific Instruments 77 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2190208|
|Abstract:||At present transmission electron energy loss spectrum (EELS) analysis is only carried out in dedicated research instruments such as transmission electron microscopes (TEMs) or scanning transmission electron microscopes. This article presents a new design of second-order geometric aberration corrected EELS spectrometer attachment using split plates, which enables conventional scanning electron microscopes (SEMs) to provide TEM-like EELS spectra. Correction to a third-order dominant geometric aberration pattern has been achieved, which indicates that most of the second-order geometric aberration component is eliminated. This second-order aberration corrected spectrometer attachment design can enable SEMs to provide transmission EELS spectrums. © 2006 American Institute of Physics.|
|Source Title:||Review of Scientific Instruments|
|Appears in Collections:||Staff Publications|
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