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|Title:||Reduction of charging effects using vector scanning in the scanning electron microscope|
|Authors:||Thong, J.T.L. |
Scanning electron microscopy
|Source:||Thong, J.T.L.,Lee, K.W.,Wong, W.K. (2001). Reduction of charging effects using vector scanning in the scanning electron microscope. Scanning 23 (6) : 395-402. ScholarBank@NUS Repository.|
|Abstract:||We describe a vector scanning system to reduce charging effects during scanning electron microscope (SEM) imaging. The vector scan technique exploits the intrinsic charge decay mechanism of the specimen to improve imaging conditions. We compare SEM images obtained by conventional raster scanning versus vector scanning to demonstrate that vector scanning successfully reduces specimen-charging artifacts.|
|Appears in Collections:||Staff Publications|
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