Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/57224
Title: Reduction of charging effects using vector scanning in the scanning electron microscope
Authors: Thong, J.T.L. 
Lee, K.W.
Wong, W.K. 
Keywords: Raster scan
Scanning electron microscopy
Specimen charging
Vector scanning
Issue Date: 2001
Source: Thong, J.T.L.,Lee, K.W.,Wong, W.K. (2001). Reduction of charging effects using vector scanning in the scanning electron microscope. Scanning 23 (6) : 395-402. ScholarBank@NUS Repository.
Abstract: We describe a vector scanning system to reduce charging effects during scanning electron microscope (SEM) imaging. The vector scan technique exploits the intrinsic charge decay mechanism of the specimen to improve imaging conditions. We compare SEM images obtained by conventional raster scanning versus vector scanning to demonstrate that vector scanning successfully reduces specimen-charging artifacts.
Source Title: Scanning
URI: http://scholarbank.nus.edu.sg/handle/10635/57224
ISSN: 01610457
Appears in Collections:Staff Publications

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