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Title: Recent developments in scanning electron microscope design
Authors: Khursheed, A. 
Issue Date: 2001
Citation: Khursheed, A. (2001). Recent developments in scanning electron microscope design. Advances in Imaging and Electron Physics 115 (C) : 197-285. ScholarBank@NUS Repository.
Abstract: Some improvements to scanning electron microscope resolution with respect to the redesign of its electron lenses are discussed. Each design is simulated by computer programs that are able to calculate electric/magnetic field distributions and plot electron trajectory paths through them. The on-axis aberrations of the objective lens have typically been reduced by over one order of magnitude and the resolution has been improved by more than a factor of 3. Significant progress has been made particularly with respect to low voltage scanning electron microscopy. Miniature high-resolution electrostatic columns have been proposed for low-voltage applications, which measure only a few millimeters high, while permanent magnet miniature columns have been designed that have heights less than 100 mm. As integrated circuit device feature sizes continue to shrink, even higher resolution demands on the scanning electron microscope are expected in the future.
Source Title: Advances in Imaging and Electron Physics
ISSN: 10765670
DOI: 10.1016/S1076-5670(01)80096-3
Appears in Collections:Staff Publications

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