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|Title:||New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive|
Microelectromechanical systems (MEMS) comb drive
|Citation:||Zhao, T., Liang, Y.C. (2003-12). New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive. IEEE Transactions on Industrial Electronics 50 (6) : 1337-1339. ScholarBank@NUS Repository. https://doi.org/10.1109/TIE.2003.819567|
|Abstract:||An actuation scheme for the push-pull electrostatic microelectromechanical systems (MEMS) comb drive actuators was discussed. The net electrostatic force and the corresponding displacement were derived. It was found that the displacement amplitude excited by the new form of driving voltages was more than three times as large than which was achievable using the conventional form for the same applied system voltage. It was observed that the scheme allowed user the flexibility to use lower actuation voltages for larger displacement without altering the MEMS structure.|
|Source Title:||IEEE Transactions on Industrial Electronics|
|Appears in Collections:||Staff Publications|
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