Please use this identifier to cite or link to this item: https://doi.org/10.1109/TIE.2003.819567
Title: New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
Authors: Zhao, T.
Liang, Y.C. 
Keywords: Microactuation
Microelectromechanical systems (MEMS) comb drive
Issue Date: Dec-2003
Source: Zhao, T., Liang, Y.C. (2003-12). New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive. IEEE Transactions on Industrial Electronics 50 (6) : 1337-1339. ScholarBank@NUS Repository. https://doi.org/10.1109/TIE.2003.819567
Abstract: An actuation scheme for the push-pull electrostatic microelectromechanical systems (MEMS) comb drive actuators was discussed. The net electrostatic force and the corresponding displacement were derived. It was found that the displacement amplitude excited by the new form of driving voltages was more than three times as large than which was achievable using the conventional form for the same applied system voltage. It was observed that the scheme allowed user the flexibility to use lower actuation voltages for larger displacement without altering the MEMS structure.
Source Title: IEEE Transactions on Industrial Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/56790
ISSN: 02780046
DOI: 10.1109/TIE.2003.819567
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