Please use this identifier to cite or link to this item: https://doi.org/10.1049/el:20072424
Title: Micromechanical resonator with ultra-high quality factor
Authors: Palaniapan, M. 
Khine, L.
Issue Date: 2007
Source: Palaniapan, M., Khine, L. (2007). Micromechanical resonator with ultra-high quality factor. Electronics Letters 43 (20) : 1090-1092. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20072424
Abstract: A 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor (Q) values over 1 million in ambient pressures as high as 200Pa is reported. A maximum Q value of 1.6 million was experimentally measured for the resonator designed for this study. It was also experimentally observed that the Q value for the designed bulk mode resonator was relatively independent for pressures below 200Pa, suggesting that the Q is pressure limited for pressure higher than 200Pa. © The Institution of Engineering and Technology 2007.
Source Title: Electronics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/56621
ISSN: 00135194
DOI: 10.1049/el:20072424
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