Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications

Abstract

This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures. Quadrature error occurs when the proof mass of a microgyroscope oscillates along an axis that is not exactly parallel to the lateral-axis. The imbalance due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The proposed mathematical model was verified by the finite element software IntelliCAD, and found to have a good agreement on angles of rotation of comb fingers. The mathematical model provides a new avenue in evaluating the quadrature error system and in saving the overall simulation time.