Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2824478
Title: Horizontally directed growth of carbon nanotubes utilizing self-generated electric field from plasma induced surface charging
Authors: Law, J.B.K.
Koo, C.K. 
Thong, J.T.L. 
Issue Date: 2007
Citation: Law, J.B.K., Koo, C.K., Thong, J.T.L. (2007). Horizontally directed growth of carbon nanotubes utilizing self-generated electric field from plasma induced surface charging. Applied Physics Letters 91 (24) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2824478
Abstract: Plasma induced surface charging during carbon nanotube (CNT) growth via radio frequency plasma-enhanced chemical vapor deposition is exploited to direct the growth in a horizontal direction on a device substrate without the need for external biasing arrangements. Using a silicon-on-insulator substrate, a pair of electrodes is fabricated in which one electrode is shorted to the handle layer and the other is left floating. A potential difference results from the plasma, and creates a lateral electric field between the electrodes that is used to direct the growth of CNTs. The approach allows for wafer-scale growth of laterally aligned CNTs. © 2007 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/56219
ISSN: 00036951
DOI: 10.1063/1.2824478
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