Please use this identifier to cite or link to this item:
|Title:||Horizontally directed growth of carbon nanotubes utilizing self-generated electric field from plasma induced surface charging|
|Source:||Law, J.B.K., Koo, C.K., Thong, J.T.L. (2007). Horizontally directed growth of carbon nanotubes utilizing self-generated electric field from plasma induced surface charging. Applied Physics Letters 91 (24) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2824478|
|Abstract:||Plasma induced surface charging during carbon nanotube (CNT) growth via radio frequency plasma-enhanced chemical vapor deposition is exploited to direct the growth in a horizontal direction on a device substrate without the need for external biasing arrangements. Using a silicon-on-insulator substrate, a pair of electrodes is fabricated in which one electrode is shorted to the handle layer and the other is left floating. A potential difference results from the plasma, and creates a lateral electric field between the electrodes that is used to direct the growth of CNTs. The approach allows for wafer-scale growth of laterally aligned CNTs. © 2007 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 22, 2018
WEB OF SCIENCETM
checked on Jan 22, 2018
checked on Feb 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.