Geometric error compensation for multi-axial precision motion systems using support vectors

Abstract

A new method for geometrical error compensation of precision motion systems using support vector machines (SVMs) will be developed in this paper. The compensation is carried out with respect to an overall geometrical error model which is constructed from measurements made with respect to each axis of the machine. These error components are modeled using support vector regression method, thus dispensing with the conventional look-up table. The adequacy and clear benefits of the proposed approach are illustrated from an application to a two-axial precision motion platform.