Please use this identifier to cite or link to this item:
|Title:||Full silicidation of silicon gate electrodes using nickel-terbium alloy for MOSFET applications|
|Source:||Lim, A.E.-J., Lee, R.T.P., Tung, C.H., Tripathy, S., Kwong, D.-L., Yeo, Y.-C. (2006-04). Full silicidation of silicon gate electrodes using nickel-terbium alloy for MOSFET applications. Journal of the Electrochemical Society 153 (4) : G337-G340. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2171827|
|Abstract:||The full silicidation of silicon gate electrodes using Ni-Tb alloy was investigated for metal oxide semiconductor field effect transistor (MOSFET) applications. Results showed that a dual-layer silicide gate consisting of a top NiTb silicide layer and a bottom NiSi layer was formed. Full silicidation using Ni0.8 Tb0.2 resulted in a gate work function of 4.41 eV. This is lower than a work function of 4.68 eV obtained from full Ni silicidation. The work function lowering was linked to structural changes in the underlying NiSi layer. No physical or electrical degradation was observed after forming gas annealing at 420°C for 30 min. NiTb-silicided gate electrodes have work functions suitable for application in advanced transistor structures. © 2006 The Electrochemical Society. All rights reserved.|
|Source Title:||Journal of the Electrochemical Society|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 22, 2018
WEB OF SCIENCETM
checked on Jan 23, 2018
checked on Feb 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.