Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3665620
Title: Fabrication of large-area ultra-thin single crystal silicon membranes
Authors: Dang, Z.Y.
Motapothula, M.
Ow, Y.S. 
Venkatesan, T. 
Breese, M.B.H. 
Rana, M.A.
Osman, A.
Issue Date: 28-Nov-2011
Source: Dang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A. (2011-11-28). Fabrication of large-area ultra-thin single crystal silicon membranes. Applied Physics Letters 99 (22) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3665620
Abstract: Perfectly, crystalline, 55 nm thick silicon membranes have been fabricated over several square millimeters and used to observe transmission ion channeling patterns showing the early evolution of the axially channeled beam angular distribution for small tilts away from the [011] axis. The reduced multiple scattering through such thin layers allows fine angular structure produced by the highly non-equilibrium transverse momentum distribution of the channeled beam during its initial propagation in the crystal to be resolved. The membrane crystallinity and flatness were measured by using proton channeling measurements and the surface roughness of 0.4 nm using atomic force microscopy. © 2011 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/55987
ISSN: 00036951
DOI: 10.1063/1.3665620
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