Please use this identifier to cite or link to this item: https://doi.org/10.1109/TED.2005.856189
Title: Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
Authors: Yiang, K.Y.
Yoo, W.J. 
Krishnamoorthy, A.
Keywords: Conduction mechanism
Iow-k
Porosity
Issue Date: Oct-2005
Source: Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A. (2005-10). Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric. IEEE Transactions on Electron Devices 52 (10) : 2333-2339. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2005.856189
Abstract: The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength. © 2005 IEEE.
Source Title: IEEE Transactions on Electron Devices
URI: http://scholarbank.nus.edu.sg/handle/10635/55756
ISSN: 00189383
DOI: 10.1109/TED.2005.856189
Appears in Collections:Staff Publications

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