Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4798244
Title: Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators
Authors: Lin, Y.-S.
Qian, Y.
Ma, F.
Liu, Z.
Kropelnicki, P.
Lee, C. 
Issue Date: 18-Mar-2013
Citation: Lin, Y.-S., Qian, Y., Ma, F., Liu, Z., Kropelnicki, P., Lee, C. (2013-03-18). Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators. Applied Physics Letters 102 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4798244
Abstract: Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 V bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using released DSRR structures shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters. © 2013 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/55619
ISSN: 00036951
DOI: 10.1063/1.4798244
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