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Title: Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
Authors: Pang, C.K. 
Lu, Y.
Li, C.
Chen, J.
Zhu, H.
Yang, J.
Mou, J.
Guo, G.
Chen, B.M. 
Lee, T.H. 
Keywords: MEMS
Probe-based storage systems
Self-sensing actuation
Issue Date: Oct-2009
Citation: Pang, C.K., Lu, Y., Li, C., Chen, J., Zhu, H., Yang, J., Mou, J., Guo, G., Chen, B.M., Lee, T.H. (2009-10). Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems. Mechatronics 19 (7) : 1158-1168. ScholarBank@NUS Repository.
Abstract: Due to the renowned superparamagnetic effect encountered in conventional magnetic data storage, many alternative futuristic data storage platforms have been proposed, e.g. Probe-Based Storage Systems (PBSS) successfully demonstrated in the "Millipede" project [Eletheriou E, Antonakopoulos T, Binning GK, Cherubini G, Despont M, Dholakia A, et al. Millipede-a MEMS-based scanning-probe data-storage system. IEEE Trans Magn 2003;39(2):938-45]. In this paper, a micro X-Y stage with 6 mm × 6 mm recording media platform actuated by capacitive comb drives is designed and fabricated in a so-called "Nanodrive" PBSS. The developed prototype is fabricated by micromachining techniques with the integration of a 40 nm thick PolyMethyl-MethAcrylate (PMMA) recording media. Using Finite Element Analysis (FEA) on the developed platform, the first two dominant in-plane resonant modes of the micro X-Y stage at 440 Hz are captured. A displacement range of up to 20 μm can be achieved at an input driving voltage of 55 V. A Capacitive Self-Sensing Actuation (CSSA) circuit and robust decoupling control scheme are also designed for the micro X-Y stage for improved servo control. © 2009.
Source Title: Mechatronics
ISSN: 09574158
DOI: 10.1016/j.mechatronics.2009.03.005
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