Design of a parallel magnetic box energy analyzer attachment for electron microscopes

Abstract

This paper presents the design of a parallel electron magnetic box analyzer, where the energy of detection varies from 50 eV to 2500 eV. Simulations results predict that the analyzer will have an average relative energy resolution of 0.33% (minimum of 0.147% and maximum of 0.622%) on a flat horizontal detection plane located well away from the primary electron beam axis for a polar angular spread of ±3°. More than half the output energy range of the analyzer is predicted to have second-order (or higher) focusing optics. The analyzer is small enough to operate as an add-on attachment inside the specimen chamber of scanning Auger electron microscopes (SAMs) and scanning electron microscopes (SEMs). The present analyzer design measures 90 mm in length and is 40 mm high. © 2011 Elsevier B.V. All rights reserved.