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Title: Design of a parallel magnetic box energy analyzer attachment for electron microscopes
Authors: Khursheed, A. 
Keywords: Auger electron spectroscopy
Electron energy spectrometers
Magnetic sector analyzer
Parallel energy detection
Scanning electron microscopy
Issue Date: Feb-2011
Citation: Khursheed, A. (2011-02). Design of a parallel magnetic box energy analyzer attachment for electron microscopes. Journal of Electron Spectroscopy and Related Phenomena 184 (1-2) : 57-61. ScholarBank@NUS Repository.
Abstract: This paper presents the design of a parallel electron magnetic box analyzer, where the energy of detection varies from 50 eV to 2500 eV. Simulations results predict that the analyzer will have an average relative energy resolution of 0.33% (minimum of 0.147% and maximum of 0.622%) on a flat horizontal detection plane located well away from the primary electron beam axis for a polar angular spread of ±3°. More than half the output energy range of the analyzer is predicted to have second-order (or higher) focusing optics. The analyzer is small enough to operate as an add-on attachment inside the specimen chamber of scanning Auger electron microscopes (SAMs) and scanning electron microscopes (SEMs). The present analyzer design measures 90 mm in length and is 40 mm high. © 2011 Elsevier B.V. All rights reserved.
Source Title: Journal of Electron Spectroscopy and Related Phenomena
ISSN: 03682048
DOI: 10.1016/j.elspec.2010.12.038
Appears in Collections:Staff Publications

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