Please use this identifier to cite or link to this item: https://doi.org/10.1143/JJAP.47.4913
Title: Demonstration of secondary electron detection using monolithic multi-channel electron detector
Authors: Tanimoto, S.
Pickard, D.S. 
Kenney, C.
Hast, J.
Pease, R.F.
Keywords: DIFA
DiVa
Inspection
Lithography
Multi-channel detector
Multi-electron-beam system
Secondary electron detection
Issue Date: 20-Jun-2008
Source: Tanimoto, S., Pickard, D.S., Kenney, C., Hast, J., Pease, R.F. (2008-06-20). Demonstration of secondary electron detection using monolithic multi-channel electron detector. Japanese Journal of Applied Physics 47 (6 PART 2) : 4913-4917. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.47.4913
Abstract: To check the feasibility of the detection scheme of a distributed-axis, fixed-aperture system, secondary electron detection using a monolithic multi-channel electron detector, which has a through-hole for primary beamlet transmittance on each detection area, was demonstrated. An experimental setup consisting of a sample, quadrupole deflector, field terminator and detector was mounted on a stage of a scanning electron microscope, and the distributions of the secondary electrons at the detection plane were measured by three neighboring channels. The deflection of the secondary electrons was also experimentally checked. The results exhibited good agreement with simulated predictions. We conclude that the landing area of secondary electrons from one primary beamlet will be confined to one corresponding channel of the monolithic multi-channel electron detector with an axial magnetic field on the order of 0.1 T. © 2008 The Japan Society of Applied Physics.
Source Title: Japanese Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/55523
ISSN: 00214922
DOI: 10.1143/JJAP.47.4913
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