Please use this identifier to cite or link to this item: https://doi.org/10.1109/TCST.2004.833608
Title: Coordinated motion control of moving gantry stages for precision applications based on an observer-augmented composite controller
Authors: Tan, K.K. 
Lim, S.Y.
Huang, S. 
Dou, H.F. 
Giam, T.S.
Issue Date: Nov-2004
Citation: Tan, K.K., Lim, S.Y., Huang, S., Dou, H.F., Giam, T.S. (2004-11). Coordinated motion control of moving gantry stages for precision applications based on an observer-augmented composite controller. IEEE Transactions on Control Systems Technology 12 (6) : 984-991. ScholarBank@NUS Repository. https://doi.org/10.1109/TCST.2004.833608
Abstract: High-precision operation in gantry systems is required to meet higher demands on positioning accuracy in a wide range of applications such as circuit assembly, precision metrology, and wafer stepping. In this paper, the experimental study of an observer-augmented composite control scheme for coordinated motion control of moving gantry stages for precision applications is presented. The scheme will be implemented and compared to other control schemes currently available for this purpose, including a master-slave and a set-point coordinated scheme. Experimental results will illustrate the enhanced performance of the fully coordinated control scheme with respect to tight trajectory tracking purposes. © 2004 IEEE.
Source Title: IEEE Transactions on Control Systems Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/55448
ISSN: 10636536
DOI: 10.1109/TCST.2004.833608
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